? GaN-on-Si (100mm,150mm,200mm,300mm)
? D-mode and E-mode
? Breakdown Voltage available from 200V to 1200V
產品參數
| Items | Values/Scope |
| Substrate | Si |
| Wafer diameter | 100mm,150mm,200mm,300mm |
| Epi-layer thickness | 2-7μm |
| Wafer bow | <30 μm, Typical |
| Surface Morphology | RMS<0.5nm in 5×5 μm2 |
| Barrier | AlxGa1-xN, 0<X<1 |
| Cap layer | In-situ SiN or GaN (D-mode); p-GaN (E-mode) |
| 2DEG density | >9E12/cm2 (20nm Al0.25GaN, 150mm) |
| Electron mobility | >1800 cm2/Vs (20nm Al0.25GaN, 150mm) |
| Defect Mapping | Vertical Breakdown Behavior |
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| Sheet Resistance Mapping | Wafer Bow Mapping |
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